摘要
采用等离子体辅助化学气相沉积(PECVD)法,在316L不锈钢基体表面以不同的沉积气压和射频功率制备出类金刚石(DLC)薄膜。拉曼光谱分析结果表明:所沉积的DLC膜具有典型的类金刚石膜结构,薄膜中sp3键含量随工艺参数的不同而不同,射频功率100 W时,sp3键含量随沉积气压增高而降低。接触角测试结果表明:DLC膜沉积后,316L不锈钢表面与生理盐水和去离子水的接触角均变大,润湿性降低。
Diamond-like carbon （DLC） films were deposited on 316L stainless steel by plasma enhanced chemical vapor deposition （PECVD） under different deposition pressure and radio frequency power. The deposited films were characterized by Raman spectra. The results show that the deposited films have typical structure of DI.C films, sp3 content in deposited films is different under various process parameters, and decreases with deposition pressure when radio frequency power is 100 W. The contact angle test results show that the contact angle of 316L stainless steel with normal saline and deionized water all increase after DLC films deposition, and the wettability decreases.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2011年第2期55-57,61,共4页
Surface Technology
基金
清华大学摩擦学国家重点实验室开放基金资助项目(SKLTKF08A01)
