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AZO薄膜绒面制备方法研究进展

Research progress of preparation of textured AZO thin film
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摘要 综述了AZO透明导电薄膜绒面的间接制备方法,包括湿法腐蚀和干法刻蚀两种。对各种绒面制备方法进行了比较和总结,提出了掺铝氧化锌薄膜绒面制备工艺中需要解决的关键问题。 Indirect preparation of textured AZO transparent conductive thin film is reviewed here,including wet etching and dry etching.Various preparation technologies are compared and summarized and the key problem in preparing textured AZO thin film is proposed.
作者 周俊 张大伟 黄元申 倪争技 庄松林
机构地区 上海理工大学光学与电子信息工程学院
出处 《激光杂志》 CAS CSCD 北大核心 2011年第2期1-3,共3页 Laser Journal
基金 上海市宝山区产学研项目(cxy-2009-22)
关键词 AZO薄膜 绒面 刻蚀 太阳电池 AZO thin film textured surface etching solar cell
分类号 O484.1 [理学—固体物理]
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激光杂志
2011年 第2期

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