摘要
采用非平衡磁控溅射技术在45钢片和单晶硅片上制备出自润滑碳/铬复合镀层;采用X射线光电子能谱仪检测镀层化学成分,用X射线衍射仪分析镀层相结构,用扫描电子显微镜和透射电子显微镜观察镀层显微结构,用销-盘式摩擦磨损试验机研究镀层自润滑性能。结果表明:镀层相结构为非晶态,主要由碳和铬两种单质及其化合物组成;铬靶电流影响镀层显微结构,随着电流增加,镀层表面变得粗糙,颗粒间结合越来越紧密,镀层摩擦因数增大;铬靶电流为0.1A和0.3A时镀层有大量石墨相存在,具有良好的自润滑性能和承载能力。
Self-lubricating C/Cr composite coatings were prepared by unbalanced magnetron sputtering technology on the substrate surface of single crystal Si and 45 steel. Chernical composition, phase structure, microstructure and self-lubricating performances were investigated by means of X-ray photoelectron spectrometer, X-ray diffraction, scanning electron microscopy, transmission electron microscopy and pin-on-disc friction and wear tester. The results show that phase structure of the coatings was amorphous, mainly consisted of carbon and chromium simple substance and their compounds. Microstructure of the coatings was influenced by the chromium target current, with increasing the current, the coating surface became rough, the particles were more closely and the friction coefficient increased. The coatings had a large number of graphite phases when the chromium target current was 0. 1 and 0. 3 A, better self-lubricating performance and carrying capacity.
出处
《机械工程材料》
CAS
CSCD
北大核心
2011年第3期40-43,48,共5页
Materials For Mechanical Engineering
基金
国家自然科学基金资助项目(50975229)
国家"973"计划项同(2009CB724406)
关键词
磁控溅射
碳/铬复合镀层
自润滑性能
magnetron sputtering
C/Cr composite coating
self-lubricating performance
