摘要
针对点衍射干涉仪(PDI)的小孔衍射波前,提出了一种基于扩展奈波尔-泽尼克(Nijboer-Zernike)(ENZ)理论进行超高精度检测的方法。描述了点衍射干涉仪的工作原理和基于扩展Nijboer-Zernike多项式的相位恢复算法。分析了对光瞳函数利用Zernike多项式展开的方法。仿真实验中,当信噪比(SNR)为55 dB,采用10 bit模数转换时,得到的Zernike系数中代表波像差的虚部的恢复误差不大于3×10-5。从噪声和模数转换的角度通过模拟实验显示这种方法对实现小孔衍射波前超高精度的光学检测具有可行性。
A new method based on extended Nijboer-Zernike （ENZ） theory is proposed for testing the wavefront diffracted by a pinhole in the point diffraction interferometer （PDI）. The principle of PDI is described and the phase retrieval algorithm based on ENZ is put forward. The way in expansion of the pupil function with Zernike polynomial is analysed. In the simulation experiment, deviation in the image part of the Zernike coefficients obtained from the retrieval result is less than 3 x 10-5 , when singal-to-noise （SNR） is 55 dB with a 10-bit analog-to-digital conversion. The effect of noise and the analog-digital conversion is only involved, the result in this simulation experiment just proves that testing the wavefront diffracted by a pinhole with this method is possible.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2011年第5期204-209,共6页
Chinese Journal of Lasers
基金
国家科技重大专项资助课题
关键词
测量
极紫外光刻
点衍射干涉仪
相位复原
扩展奈波尔-泽尼克
measurement
extreme ultraviolet lithography
point diffraction interferometer
phase retrieval
extended Nijboer-Zernike
