摘要
概略介绍了基于白光的双波长相移干涉表面形貌测量系统的原理，具体分析了影响测量精度的各种误差因素，给出了相应的误差计算公式和计算结果，并用模拟测量结果和实际测量结果进行了验证和比较。
The theory of the two wavelength white light phase shifting topography measuring system is described in brief. Many sources that lead to measuring errors are analyzed, and the relative error calculating formulas and results are given. Their validity is verified by comparison with the simulated result and the measured result.
出处
《光学精密工程》
EI
CAS
CSCD
1999年第5期106-113,共8页
Optics and Precision Engineering
关键词
相移干涉
表面形貌
测量
测量精度
白光
Two wavelength phase shifting interferometry, Topography, Measurement, Accuracy
