摘要
提出了一种结构简单、易于加工的阀片式硅微流量传感器。该微流量传感器通过阀片将流量转换为梁表面弯曲应力，再由集成在阀片上的压敏电阻桥检测出流量信号。该传感器采用硅微细加工工艺制作，直接在单晶硅上加工出阀片和压敏电阻桥。该微流量传感器芯片尺寸３ ．５×３．５（ｍ ｍ） ，封装后的外形尺寸为Φ１０×４（ｍ ｍ） ；在１０ ～２００ｍｌ／ｍｉｎ 的气流量下，线性度优于５ ％ ．
A series of silicon micro flow sensors with cantilever paddles are developed. In measuring, the volume flow rate causes a deflection of the cantilever, and strain of the cantilever is detected by the piezoresistance bridge integrated on the supporting end of the beam. The sensing structure is fabricated by bulk and surface silicon micromachining on single crystal silicon. The size of the sensing chip is 3.5mm×3.5mm, and a packaged sensor is Φ10mm×4mm in size. The sensors with different detecting structures achieve different measuring ranges. Testing of the fabricated sensors shows an acceptable linearity of ±5% under the air flow rate of 10 to 200ml/min.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第12期1-5,共5页
Instrument Technique and Sensor
基金
国家自然科学基金
