摘要
利用表面刻蚀镀膜技术制备了铁基多层纳米磁性薄膜,通过刻蚀镀膜控制参数的调整,可以精确地控制薄膜的厚度。然后对薄膜进行退火处理,使薄膜晶化。最后,对薄膜磁性能进行了测量。
Ferrous magnetic nano-films were obtained by sputtering technology.The thickness of films could be controlled by adjusting the parameter of sputtering process.The films became crystal after tempered.At last,the magnetic properties of the films were measured.
出处
《上海金属》
CAS
2011年第4期19-22,共4页
Shanghai Metals
基金
同济大学工科基金项目:新型稀土掺杂铁基纳米多层磁性薄膜研究
关键词
磁性薄膜
多层
磁性能
组织
Magnetic Nano-Films
Multi-Layers
Magnetic Properties
Microstructure
