摘要
提出了一种测量KrCl*准分子灯222 nm辐射效率的辐射度学方法。KrCl*准分子灯为同轴结构,内管和外管的内,外径分别为14,16和37,40 mm。灯中充有总气压为2×104Pa的氯气(Cl2)和氪气(Kr),其中含0.5%的氯气。KrCl*准分子灯用正弦和脉冲电源来驱动。用紫外功率计测量222 nm辐照度,辐射功率由Keitz公式计算。灯的电功率则通过高压探头和电流互感器结合示波器测量得出。结果表明,KrCl*准分子灯在脉冲电源驱动下的最佳效率(11.4%)是正弦电源的2倍。
The 222 nm radiant efficiency of the coaxial KrC＊ excilamp was measured in a radiometric method.The lamp,with the diameters of the inner and outer tubes of 14,16 mm and 37,40 mm,respectively,and a pressure of 2×104 Pa,mixed with 102 Pa mbar of chlorine and 1.99×104 Pa of krypton,was driven by the sinusoidal and pulsed voltages generated with an electronic control gear（ECG）.The radiant power was derived from the irradiation,on the basis of Keitz formula.The results show that the wave-shape of the driven voltage strongly affects the radiant efficiency of the excilamp.For example,the pulsed voltage results in a maximum efficiency of 11.4%,one time higher than that driven by a sinusoidal voltage.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2011年第5期565-569,共5页
Chinese Journal of Vacuum Science and Technology
基金
西门子中国有限公司提供部分研究经费和实验设备支持
