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酸性氯化铜蚀刻废液电解再生用阳极的筛选 被引量:4

Selection of anodes for electrochemical regeneration of spent acidic cupric chloride etchant
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摘要 采用热分解法制备了8种DSA涂层阳极,通过循环伏安曲线、极化曲线、强化寿命等测试研究了不同涂层的电催化性能。结果表明,RuIrTiSnMn/Ti涂层阳极在酸性蚀刻废液电解再生工艺的阳极电流密度范围内具有最高的析氯电位,且强化寿命高(为538h),涂层成本最低,可作为酸性蚀刻废液电解再生工艺用的阳极。 Eight types of DSA coating anodes were prepared by thermal decomposition method, and the electrocatalytic performance of various coatings were studied through cyclic voltammetry, polarization curve measurement, and accelerated life test. The results indicated that the RuIrTiSnMn/Ti coating anode possesses the highest chlorine evolution potential in the range of anodic current density used in the electrolytic regeneration of spent acidic cupric chloride etchant and has a high accelerated life of 538 h as well as the lowest cost. The RuIrTiSnMn/Ti anode is suitable for electrolytic regeneration of spent acidic cupric chloride etchant.
出处 《电镀与涂饰》 CAS CSCD 北大核心 2012年第2期36-39,共4页 Electroplating & Finishing
基金 广州市科技支撑项目(2009Z1-E471)
关键词 酸性蚀刻液 电解再生 尺寸稳定阳极 电催化活性 极化曲线 acidic etchant electrolytic regeneration dimensionally stable anode electrocatalytic activity polarization curve
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