摘要
根据薄板的弹性振动理论和流体动力学理论 ,建立了能完整描述振膜式微机械泵的动态解析模型。导出了吸入过程和排出过程的流量、压力方程。揭示流量、压力等微机械泵性能参数与执行器输出以及负载之间的内在关系。而且在此基础上用有限元分析方法 ,建立了其数值模型 ,并且进行模拟 ,所得结果与实验符合较好。
By using thin plate plastic vibration theory and hydrodynamic theory, a new analytical model of membrane micropumps, which can describe the complex dynamic behavior of the pump, is proposed in this thesis. The functions of the pumping rate and the back pressure are presented. This model also presents the relation between these function parameters and the output of the actuator. Based on the analytical model, a numerical model is first founded by using Finite Element Analysis. The simulation results of the model are compared with measurements of pneumatic membrane pumps and show good agreement with them.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2000年第1期22-33,共12页
Research & Progress of SSE
基金
传感技术国家重点实验室与江苏省应用基础研究资助项目!( BJ950 4 3 )
关键词
微机械泵
物理模型
微电子机械系统
micropump
physical model
simulation
Finite Element Analysis
