摘要
简要描述了CVD金刚石薄膜技术的发展历程。介绍了纳米特别是超纳米金刚石膜、CVD金刚石大单晶的技术特点及其应用。超纳米金刚石膜在MEMS(微机电系统)、电化学和生物医学上的应用和CVD金刚石大单晶是当前的研究热点。简言之,金刚石的发展向着更大或者更小的方向深入进行,即"非大即小"。
The development course of CVD diamond film technology is briefly described in this paper. The technical features and applications of nano crystalline diamond films （NCD） especially ultra-nano crystalline diamond films （UNCD） and large size CVD single crystal diamond were introduced. Applications of ultra-nano crystalline diamond films in micro-electromechanical systems （MEMS）, electrochemistry and biomedicine, and large size CVD single crystal diamond are the current research focus and hotspots. To be brief, the development of diamonds is toward the larger or smaller size diamond in the future.
出处
《超硬材料工程》
CAS
2012年第3期39-42,共4页
Superhard Material Engineering
关键词
超纳米金刚石膜
CVD金刚石大单晶
综述
ultra-nano crystalline diamond films
CVD large single crystal diamond
review
