摘要
较全面地介绍了用于表面微观轮廓测量的几种高分辨率甚至可达亚纳米的光学测量方法及其最新进展。文中重点描述了以扫描共焦显微检测法、离焦误差检测法为代表的光触针法 ,以 TOPO轮廓仪、Nomarski显微镜、外差干涉轮廓仪、双焦干涉轮廓仪和同轴干涉轮廓仪为代表的干涉测量法和以扫描近场光学显微镜及光子扫描隧道显微镜为代表的近场光学法三种适用于表面微观轮廓测量的光学测量方法 ,分别介绍了其工作原理、特性、发展现状及存在问题 ,通过对这些方法的对比和总结 ,阐述了表面微观轮廓纳米级光学测量的发展趋势。
WT5BZ]The methods of optical measurement for surface profiles with high resolution even sub nanometer are presented generally. In the paper, three optical methods for measuring surface profile, optical probe, interferometric method and near field optics method, are mainly described. Optical probes include scanning confocal microscopy and defocus error detection. Interferometric methods include TOPO interferometric profilometer, Nomarski microscope, Heterodyne profilometry, double focus profilometer and coaxial profilometer. Near field optics methods include scanning near field optical microscopy and photo scanning optical microscopy. By reviewing and contrasting the principles, characteristics and problems with these methods, the trends of high resolution optical measurement for surface profiles are described. [WT5HZ]
出处
《光学精密工程》
EI
CAS
CSCD
2000年第4期309-315,共7页
Optics and Precision Engineering
关键词
表面微观轮廓
光学测量方法
高分辨率
surface profile
optical measurement methods
high resolution
