摘要
针对蓝宝石单晶生长过程中因热应力集中坩埚使用寿命短问题,基于ANSYS有限元分析,对晶体熔化过程中的坩埚进行瞬态传热分析,在此基础上进行不同情况下热-结构耦合分析,计算得出晶体完全熔化后坩埚的热应力分布情况。分析显示:最大热应力存在于坩埚与托盘结合处;在满足晶体生长条件下,减缓升温速度,减小温度梯度,增大托杆中间空隙,改变托盘托杆材料等方法可以减小热应力。
To solve the problem that the short service life of crucible caused by the concentrated thermal stress.Using Ansys FEM analysis to do transient analysis of the heat transfer of crucible when the crystal is melting.Then,coupling the thermal analysis and structural analysis under different conditions,and working out the distribution of thermal stress of the crucible when it has been totally melting.The analysis shows that some ways could reduce heat stress,for example： maximum thermal stress exists the joint of crucible and the tray;slowing the heating rate,decreasing the temperature gradient,increase the diameter of the hollow part of a die-pin,and change the material of the tray and die-pin,etc.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2012年第5期1458-1462,共5页
Journal of Synthetic Crystals
关键词
坩埚
有限元
温度场
热应力
crucible
finite element
temperature field
heat stress
