摘要
本文综述了模具表面处理新技术,包括了化学气相沉积(CVD)、等离子体增强化学气相沉积(PCVD)、物理气相沉积(PVD)等,重点介绍了模具离子氮碳共渗与沉积类金刚石(DLC)膜复合处理的性能及其应用.
This paper reviewed the new technologies of surface treatment on dies including chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), physic vapor deposition, et al. The emphasis was focused on the properties and applications of the composite treatment of plasma nitro- carburizing and DLC films on dies.
出处
《材料研究与应用》
CAS
2012年第4期219-223,共5页
Materials Research and Application
关键词
模具
表面改性
离子氮碳共渗
类金刚石
性能
dies
surface treatment
plasma nitro-carburizing
diamond-like carbon films
properties