摘要
柔性收集室检漏技术是氦质谱非真空积累检漏技术的一个重要分支,因此研究柔性收集室检漏技术具有重要的工程实际意义。本文首先以柔性收集室中的氦气分压为研究变量,通过建立和求解常微分方程定量得到了氦气分压随时间变化的数学解析解。其次,通过比较渗透情形与理想情形,得到了采用柔性收集室而导致的测试相对误差与时间之间的数学关系,并结合具体两例讨论了渗透系数对检漏测试结果的影响。研究结果表明:测试结果的相对误差与被测件的泄漏率、累积时间、材料的渗透系数、有效容积均相关。本文的研究结论可以为柔性收集室的工程应用提供理论依据。
Addressed the influence of the material permeation of the flexible accumulation chamber on the overall leakage rate of spacecrafts. First, the time evolution of the helium partial pressure in the flexible aceurnulation chamber (with and without permeation)was physically modeled, mathematically formulated, and analytically calculated by solving the ordinary differential equations involved. Next, the time dependence of the relative error in the measurement of He par- fial pressure was evaluated by comparing the two calculated time evolutions, one with permeation, and the other without permeation. Finally, the impact of the permeation on the test-results in leak detection was carefully studied with two specific measurements. The results show that the relative error in the leak detection depends, to a varying degree, on the leak rate of the spacecraft, accumulation time, permeation coefficient of the chamber materials, and effective volume.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第2期149-152,共4页
Chinese Journal of Vacuum Science and Technology
关键词
检漏
氦质谱非真空积累检漏法
柔性收集室
渗透率
Leak testing, Method for non-vacuum accumulation leak detection of helium mass spectrometer, Flexible accumulation chamber, Permeability