摘要
根据近场扫描架的结构和运动特点,运用非封闭网格法布线,通过双频激光干涉仪及其直线度附件来采集各条线在Z向的直线度,用最小二乘法求出扫描架X轴和Y轴所走轨迹扫描而成平面的平面度,并分析了影响直线度测量的误差因素。
According to the structure and movement characteristics of the near-field scanner, Z-oriented straightness of each line, which is distributed by non-closed grid method, is acquired by a double-frequency laser interferometer and its straightness accessories. With method of least squares, the flatness of the plane, which is shaped by the trace of X-axis and Y-axis movement of the scanner, is computed. And error fac- tors, which affect straightness measurement, are analyzed.
出处
《计测技术》
2013年第2期51-54,共4页
Metrology & Measurement Technology
关键词
激光干涉仪
平面度
最小二乘法
误差因素分析
laser interferometer
flatness
method of least squares
error factors analysis
