摘要
针对现有MEMS惯性开关各向响应不一致和闭合时间短等问题,设计了一个采用周边弹簧支撑中心圆形质量块、柔性支撑固定电极结构形式的引信用MEMS万向触发开关。仿真结果表明,开关响应时间不大于300μs。由于采用圆形质量块,开关对0°～90°不同着角的冲击都能可靠响应;由于采用柔性电极,开关的闭合时间从小于10μs延长到30μs以上。
In order to solve the problems of short closing time and inconsistent response in different directions of the existing MEMS inertial switches, a fuze MEMS omnidirectional trigger switch with flexible electrodes and round mass was designed in the article. The simulation results showed that this MEMS trigger switch had a reli- able response to the impact within 0°-90° angle of entry, the closing time extends from less than 10 μs to more than 33μs and the response time was less than 300μs.
出处
《探测与控制学报》
CSCD
北大核心
2013年第2期10-14,共5页
Journal of Detection & Control
