摘要
采用喷淋式蚀刻机,以FeCl3基蚀刻液对模具钢进行喷淋蚀刻,通过测定不同蚀刻液温度、不同喷淋压力下的蚀刻深度,考察了几个独立因素对蚀刻深度的影响,得出蚀刻深度的规律性变化:蚀刻深度增长速率随蚀刻液温度的升高而增大,随喷淋压力的增大而先增大,后逐渐减小。分析了蚀刻深度呈此种变化规律的原因。
Spray etching machine and FeCl3-based etchant were used to process the die steel.The influence of two independent factors,etchant temperature and spray pressure were investigated,specifically on the etching depth.The trend of etching depth was obtained with experimental analysis.Via experiments it is found that the growth rate of etching depth is increased with the rise of the etchant temperature.However,the growth rate of etching depth first increases and then decreases gradually with the increase of the spray pressure.The factors that contribute to this change of etching depth were analyzed.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2013年第4期21-23,共3页
Surface Technology
基金
国家自然科学基金重点资助项目(U1134003)
国家青年科学基金资助项目(51205066)
广东省自然科学基金资助项目(s2012010009022)
教育部博士点基金(20114420120002)
关键词
喷淋蚀刻
蚀刻液温度
喷淋压力
蚀刻深度
spray etching
etchant temperature
spray pressure
etching depth
