摘要
本实验室研制了国内首台宽离子能量检测范围飞行时间质谱仪。仪器采用紧凑式电子轰击源设计，配合离子透镜系统有效的调制离子流，飞行时间质量分析器采用了离子垂直引入式，双场加速和双场反射以及大尺寸MCP检测装置设计。仪器单离子信号半峰宽约2ns，仪器分辨率优于1600FWHM，检测实际样品质量范围为1～127amu（仪器理论质量检测上限优于800ainu），可检测离子能量范围优于2个数量级（3～140eV）。若该TOF质量分析器与短瞬高压脉冲放电离子源耦合联用，可广泛应用于高能离子束的快速检测，如真空阴极放电对制备薄膜、离子注入材料的表征，导电材料的离子电荷态分布以及离子扩散速度的测定等。
A wide detection range of ion energy time-of-flight （TOF） mass spectrometer was developed successfully. The instrument coupled associated with electron impact source, ions flow was modulated effectively by a lens system, and then introduced into time-of-flight mass analyzer, which had dual field of acceleration region and reflection region, and a large-size microchannel plate （MCP） detection device. Half-peak width of single ion signal is about 2 ns, resolution of the instrument is better than 1600 FWHM, mass range of actual samples is 1-127amu （theoretical mass detection limit could be higher than 800 amu）, ion energy detection range is better than two orders of magnitude （3-140 eV）. If couple associated with short-instantaneous pulse discharge ion source, the TOF mass analyzer could be used in the field of rapid detection of high-energy ion beam, such as vacuum cathode discharge preparation of thin films, ion injection material characterization, the ion charge state distribution of conductive material and determination of ion diffusion speed.
出处
《分析化学》
SCIE
EI
CAS
CSCD
北大核心
2013年第10期1614-1619,共6页
Chinese Journal of Analytical Chemistry
基金
国家863项目(No.SS2012AA063201)资助
关键词
宽离子能量检测范围
电子轰击离子源
飞行时间质谱仪
Ions with wide energies distribution
Electron impact source
Orthogonal acceleration time-of-flight mass spectrometer
