摘要
通过sol-gel旋涂法在石英玻璃衬底上制备了不同Mg掺杂含量的ZnO薄膜,并运用XRD、SEM、UV-VIS、四探针等测试手段分析研究了Mg含量对ZnO薄膜结构及透明导电性的影响。结果表明,掺Mg后薄膜仍保持六方纤锌矿结构并沿(002)方向择优生长,随着Mg含量的增加,结晶质量先变好,后变差,(002)峰位先向小角度方向移动,后又往大角度方向回升,薄膜晶粒尺寸变大,尺寸更加均匀,薄膜表面更加平整,当掺杂量增加至3 at%时,薄膜表面开始出现团聚现象;适量的Mg掺杂可提高薄膜可见光透过率和禁带宽度,透过率最高可达88.83%,增加至3 at%时,因散射和缺陷增多,透过率发生显著下降;由于Mg的金属性强于Zn而出现的burstain-Moss效应与缺陷带宽随着Mg含量而变化的共同作用,薄膜带隙出现先宽后窄再变宽的现象;四探针表征显示,Mg掺杂可降低ZnO薄膜的表面电阻,但仍具有较高的电阻率。
ZnO thin films with different Mg contents were deposited onto quartz glass substrate by sol-gel spin coating method. XRD, SEM, UV-VIS and four-point probe meter were used to analysis the effects of Mg doping contents on structure and transparent conductive properties of the films. The results show that, ZnO thin films remain hexagonal wurtzite structure with c-axis as the preferential growth orientation after Mg doped. The crystalline quality get better then become worse, peak position of （002） shifts small angle direction before shifts high one and the grains are become bigger and more uniform and the surface of fihns are become more flat with the Mg content increasing, while the Mg content increases to 3 at%, the film surface appears clusters. Ultraviolet and visible light transmittance and band gap of the films can be improved by doped appropriate amount Mg, The best transmittance can reach 88.83%. However, when the Mg content reaches 3at%, the transmittance drops obviously for the effects of absorbing and scattering of increasing defects and dusters. The band gap of the films are widen first then narrowed and last widen again as a result of co-effects of the changes of defects band width and the Burstein-Moss effect, which cause by the metallic differences of Mg ion and Zn ion; the four-point probe reveals that Mg doping can lower surface resistance of the ZnO films.
出处
《中国陶瓷》
CAS
CSCD
北大核心
2014年第2期15-20,共6页
China Ceramics
基金
国家自然基金项目(61066003)
江西省科技支撑计划资助项目(2010BGA01100)
江西省对外合作资助项目(20111BDH80031
20132BDH80025)
江西省自然基金资助项目(20111BAB202005
20132BAB202001)
江西省主要学科学术和技术带头人培养计划项目(20123BCB22002)
江西省高等学校科技落地计划(KJLD12085)
江西省教育厅科技资助项目(GJJ12494
GJJ13643
GJJ13625)
景德镇陶瓷学院研究生创新专项资金项目
