摘要
针对微电极制作的效率问题,提出了一种快速在线微电极加工成形的方法,设计了一种新型卧式微电火花机床。该机床由金刚石砂轮超精密在线电极磨削、线电极电火花在线电极磨削共同完成微米级电极的高效精密制作,该机床组成部分还包括基于CCD的在线光学尺寸检测与测量系统、精密运动与进给系统、纳秒级独立式脉冲放电电源与放电状态检测反馈系统组成。在该机床上进行了微电极制作、微小孔加工以及微电火花铣削等实验,加工出ф15μm微细轴和ф50μm微小孔。
To improve the efficiency of microelectrode fabrication, this paper proposed a high ethcient horizontal micro electric discharge machine, in which ultra--precision diamond wheel grinding method and WEDG method were combined for microelectrode fabrication. The machine consisted of a CCD online dimensional examination system, precision motion and feeding system, nanosecond- pulse independent discharged power supply and gap state--detection system. Experimental study on microelectrode, micro nozzle fabrication and microstructure milling were conducted by the machine. Microelectrode with 15 micrometers in diameter and micro hole with 50 micrometers in diameter were done in experiments.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2014年第5期657-660,668,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(51175204
61108043)
关键词
微电极制作
放电加工
微电火花
线电火花磨削
electrode fabrication
electro discharge machining
micro - EDM （electric discharge machining）
WEDG（wire electrical discharge grinding）
