摘要
综述了现有溶解氧传感器的检测方法及原理,讨论了溶解氧传感器的热点研究方向,即基于荧光猝灭原理的无膜溶解氧传感器和微型全固态溶解氧传感器。着重介绍了微型全固态溶解氧传感器,指出该传感器使用微加工技术和固体电解质技术,实现了溶解氧传感器的小型化、微型化,提升了微传感器的选择性和实用性。在环保领域,能够用于分布式、在线监测的光学无膜溶解氧传感器将是主要的发展方向;在生物医疗领域,能够植入活体组织内的微型全固态溶解氧传感器则可能成为最重要的研究热点之一。
The detection method and principle of the existing dissolved oxygen sensor are summarized. The research hotspot of the dissolved oxygen sensor is discussed, i.e. the membrane-less dissolved oxygen sensor based on the fluorescence quenching principle and the miniature solidstate dissolved oxygen sensor. The miniature solid-state dissolved oxygen sensor is mainly intro duced. It is pointed that through the microfabrication technology and solid electrolyte technolo- gy, the miniaturization of the sensor is achieved, the selectivity and practicality of the sensor are improved. In the field of the environmental protection, the membrane-less dissolved oxygen sensor for distributed on-line monitoring will be the main development direction; in the biomedical field, the miniature solid-state dissolved oxygen sensor implanted the inside living tissue may become one of the most important research hotspots.
出处
《微纳电子技术》
CAS
北大核心
2014年第3期168-175,202,共9页
Micronanoelectronic Technology
基金
国家863重大石油装备项目(2011ZX05020-003)
关键词
溶解氧传感器
微加工技术
固态电解质
荧光猝灭法
无膜溶解氧传感器
dissolved oxygen sensor
microfabrieation technology
solid electrolyte
quenching fluorescence method
membrane-less dissolved oxygen sensor
