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压阻式高量程微加速度计的设计 被引量:2

The Design of a High Range Piezoresistive Micro Accelerometer
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摘要 为了满足过载环境对高量程加速度计的需求,设计了一种高量程微加速度计。通过对敏感结构建立数学模型及Ansys静力学仿真,确定了该加速度计的总体设计,最后对加工完成的加速度计进行了测试。结果表明,该加速度计的灵敏度为193.3μV/g,在受到10 000 g以上的加速度作用时仍能正常工作,能够满足实际需要。 A high-range micro-accelerometer was designed to meet the requirement of overload environment. The mathematical model for the structure was proposed, and then the mechanical property was simulated. Finally, the test results were presented. It shows that the the sen- sitivity of the aceelerometer is 193.3/xV/g,and it can work normally in overload environment.
出处 《弹箭与制导学报》 CSCD 北大核心 2014年第1期158-161,共4页 Journal of Projectiles,Rockets,Missiles and Guidance
基金 国家自然科学基金(51075374)资助
关键词 高过载 高量程 微加速度计 压阻效应 仿真 overload high range micro accelerometer piezoresistive simulation
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