摘要
本仪器利用X射线荧光分析原理和微机技术研制而成的。以小型X射线管作激发源,射线用小孔准直,样品用光学定位,样品最小测量面直径为0.1mm。微机多道实时显示能谱。它能快速、精确、无损测量多种微小面积上的单、双涂层厚度和合金涂层厚度及成分,结果由屏幕显示并打印输出,还能作统计处理。
This instrument was based on the XRF technique and microcomputer. X-ray radiation from a small X-ray tube was collimated with a small hole and the emitted fluorescence spot at the surface of a sample could be seen with an optical microscope. The minimum diameter of the measuring area was 0.1mm. A microcomputer-based MCA was used. The unit was able to measure thickness of either single or double coating layers noEdestructively and determine thickness and composition of an alloy coating layer simultaneously.
出处
《核技术》
CAS
CSCD
北大核心
1991年第9期513-519,共7页
Nuclear Techniques
关键词
小面积
X射线荧光
涂层测厚仪
Small area X-ray fluorescence Coating thickness
