摘要
制冷机低温泵的冷源是小型制冷机。制冷机在日常运行中可能发生种种故障 ,对制冷机的制冷能力和制冷温度都有明显的影响 ,亦对泵的抽气特性产生影响。本文着重讨论制冷机在日常运行中可能发生的种种故障。
The condensation source of the modern cryopump is a mini refrigerator. The cryopump may have some kinds of troubles when it does circulations daily, and these troubles may give obvious effects to the ability of the refrigerator and the temperature of the refrigerator. These troubles will also effect to the air extracting character of the pump. This article mainly discusses what kinds of troubles may occur when the refrigerator circulates daily, the reason of these troubles and how to eliminate the troubles.
出处
《真空》
CAS
北大核心
2001年第6期45-49,共5页
Vacuum
