摘要
为研究射频感应等离子体(RFICP)受等离子体发生器装置结构及工作频率的影响效应,以期可以为装置的正常工作提供参考,首先建立了射频感应热等离子体的湍流模型,然后利用商业软件ANSYS FLUENT对等离子体发生器装置内的纯氩气热等离子体温度及流场分布进行了计算,并研究了工作频率及装置结构的变化对射频感应等离子体传热及流动特性的影响。研究结果表明:提高装置的工作频率、增大等离子体炬内半径、增加射频线圈匝数并减小两匝线圈间距均能使发生器装置内的等离子体轴向速度减小,等离子体温度显著增加,并对等离子体炬内的流场分布产生较大的影响。因此可以通过改变相应的装置结构及工作频率来控制等离子体发生器装置内的温度和流场分布,以便使装置能够稳定运行。
In order to investigate the effects of operating frequency and structure of plasma generator equipment on the characteristics of radio frequency inductively coupled plasma(RFICP) so as to provide valuable theoretical guidelines for design and work of plasma generator equipment,we established a turbulence model of the inductively coupled plasma, and calculated the spatial distribution of temperature, velocity and electromagnetic field for argon thermal plasma by using the ANSYS FLUENT software. Moreover, we studied the influences of operating frequency and structure of plasma generator equipment on the spatial distribution of temperature and velocity in detail. The research results show that increases in operating frequency, radius of plasma torch, number of turns of the coil, and decreases of the radius and spacing between turns of the coil have great effects on distribution of temperature and flow field in the plasma generator. So we can control the temperature and flow field by varying the operating frequency and structure of plasma generator equipment for steady operation.
作者
陈文波
陈伦江
刘川东
程昌明
童洪辉
朱海龙
CHEN Wenbo;CHEN Lunjiang;LILT Chuandong;CHENG Changming;TONG Honghui;ZHU Hailong(College of Electrical Engineering,University of South China,Hengyang 421001,China;Southwestern Institute of Physics, Chengdu 610041,China;College of Physics and Electronics Engineering,Shanxi University,Taiyuan 030006,China)
出处
《高电压技术》
EI
CAS
CSCD
北大核心
2019年第1期316-323,共8页
High Voltage Engineering
基金
国家自然科学基金(11535003
11675074)
湖南省教育厅项目(15C1174)~~
关键词
射频感应耦合
湍流等离子体
温度
流场
数值模拟
inductively coupled
turbulence plasma model
temperature
flow field
numerical simulation
