摘要
扫描隧道显微镜(简称STM)和原子力显微镜(简称AFM),它们也可统称为扫描探针显微镜(简称SPM)。原子力显微镜(AFM) 是近十几年来表面成像技术中最重要的进展之一。与扫描电子显微镜相比,它具有较高的分辨率。本文将讨论原子力显微镜的工作原理、原子力显微镜的发展概况和应用。
Hie Scanning Tunneling Microscopy (SIM) and Atomic Force Microscopy (AFM) can be called by a joint name the Scanning Probe Microscopy (SPM) . AFM is the foremost development on the image technique of the surface in near ten years. AFM be provided with higher resolution than the scanning electron microscopy. In the paper, the working principle of AFM, the development general situation and the application introduce for AFM will be discussed.
出处
《现代仪器》
2002年第3期6-9,共4页
Modern Instruments
