摘要
角度测量是几何量计量技术的重要组成部分。本文对近年来常用的几种角度测量方法及其发展进行了介绍 ,主要介绍了其中最具有发展前途的光学测角技术。对圆光栅测角法、激光干涉测角法和环形激光测角法分别进行了详细的介绍 ,给出了每种方法的测量原理和应用场合 。
Angle measurement is an important part of geometric metrology.In this paper,several frequently used methods of angle measurement in recent years and their development situations are described.Especially,optical angle measurement technique,the most hopeful technique,is mainly introduced.Angle measurement with radical gratings,laser interference angle measurement system and ring laser goniometers,are described in detail.The principle,present status and application situation of each method are displayed.The superiority and defects of these methods are lined out.
出处
《激光杂志》
CAS
CSCD
北大核心
2002年第2期5-7,共3页
Laser Journal
