摘要
采用射频磁控溅射法制备了非晶TbFeCo薄膜及其保护层AlN薄膜 ,并研究保护层对薄膜的磁和磁光特性的影响。结果表明 ,AlN薄膜可以增强薄膜磁光效应 ,同时 ,AlN薄膜对TbFeCo磁光薄膜的矫顽力、垂直磁各向异性以及本征克尔角都有一定的影响。
Amorphous TbFeCo films covered with AlN protective layers have been prepared by RF magnetron sputtering.The influence of dielectric protective layers AlN on magnetic and magneto optical Kerr effects of rare earth transition metal films has been studied.The results showed that AlN films are suitable materials for the enhancement of Kerr rotation angle.However,we found that the coercivity H c,perpendicular magnetic anisotropy energy constants K u,and the eigenvalue θ 0 k of Kerr rotation angle of RE TM films strongly depend on the thickness of the protective AlN film.The dependence is related to the change of interfacial characteristics induced by the implantation of N and Al atoms into the magnetic film.
出处
《真空科学与技术》
CSCD
北大核心
2002年第3期209-212,220,共5页
Vacuum Science and Technology
基金
中科院上海冶金所信息功能材料国家重点实验室
湖北省自然科学基金资助项目
