摘要
在溶胶 凝胶基础上 ,采用碱 /酸两步法和浸渍镀膜技术制备出纳米多孔SiO2 薄膜 ,并将该薄膜在空气和氨气与水蒸气的混合气体中热处理。使用透射电子显微镜、原子力显微镜、傅立叶红外光谱仪、椭偏仪、分光光度计等分析了薄膜的特性。实验结果表明 :采用碱 /酸两步催化法能够明显提高纳米多孔SiO2 光学增透薄膜的力学特性 ,混合气体中的热处理又使其力学性能得到进一步改善。薄膜耐磨等力学性能增强归因于SiO2 颗粒间更多的化学键合。在力学性能增强的同时 ,薄膜折射率仍保持约 1 2 4的较低值 ,光学增透效果良好 ,透射率≥ 99 5 %。
A new method to improve the mechanical properties of nano porous silica films is reported. The thin films are prepared using the base/acid two step catalytic sol gel process and the dip coating method, and then annealed in the mixed gas of ammonia and water vapor. The films are characterized with TEM, AFM, FTIR, spectrophotometer and ellipsometery, respectively. The experimental results show that the two step catalysis remarkably strengthens the films, and the scratch resistance of the silica films is further improved after treatment in the mixed gas. The increase in strength is attributed to the cross linking of silica particles by the two step catalysis and the mixed gas treatment. And the films still have low refractive index(1.24) as well as much high transmittance over 99.5%.
出处
《原子能科学技术》
EI
CAS
CSCD
2002年第4期374-379,共6页
Atomic Energy Science and Technology
基金
国家"8 63"激光技术青年科学基金资助项目 (2 0 0 1 1 2 )
国家自然科学基金资助项目(699780 17
5980 2 0 0 7)
