摘要
半导体元件参数随温度变化而产生的温度漂移,将导致倾角传感器本身存在测量偏差,影响倾角测量的准确度.介绍了一种温度补偿方法,对基于加速度原理的差分电容式倾角传感器进行了温度补偿.经过试验验证结果表明：这种方法能够实现倾角传感器的温度补偿,在-55～ 85℃温度范围内可将倾角传感器的温漂降低1个数量级,有效地减少了环境温度对倾角传感器性能的影响.
Temperature drift of parameters of semiconductor elements along with variation of temperature, will cause inclination sensor exists measurement deviation which impact accuracy. Introduce a temperature compensation method which carry out temperature compensation on differential capacitive inclination sensor based on acceleration principle, The test results show that this method can realize temperature compensation of inclination sensor and the temperature drift decline one order of magnitude at the temperature range of -55℃～ 85℃, and effectively reduces impact of environment temperature on characteristics of inclination sensor.
出处
《传感器与微系统》
CSCD
北大核心
2014年第10期14-16,共3页
Transducer and Microsystem Technologies
关键词
倾角传感器
加速度
温度补偿
inclination sensor
acceleration
temperature compensation
