摘要
文章对SPC基本知识进行简单描述,并根据半导体硅片制造工艺的复杂性,重点论述了半导体硅片制造厂的SPC技术应用与传统行业的不同之处。
This paper carries on the simple description of the basic knowledge of SPC, and according to the complexity of semiconductor silicon wafer manufacture process, mainly discusses the different application of SPC technology and traditional industry, semiconductor manufacturing factory.
出处
《企业技术开发》
2014年第10期51-52,108,共3页
Technological Development of Enterprise
关键词
SPC
过程控制
半导体
控制图
SPC
process control
semiconductor
control chart
