摘要
本文分析阐明了罗茨泵的特征性能为漏率、零流量压缩比、最大容许压差和噪声。提出了新概念—基础压力的定义:即泵按规定条件工作,在不引入气体的情况下,标准测试罩内趋向稳定的压力。并建议以漏率取代极限压力作为罗茨泵的性能考核指标,使罗茨泵性能的测量方法更接近、更符合实际运行状态。根据实验数据,提出了对零流量压缩比测量装置中的前级管路规定的改进,对最大容许压差测量方法提出了修改以及对噪声的测量方法提出一些新的见解。
This paper clarifies that the performance of the Roots pump is leak rate, zero throughput compression ratio, maximum allowable pressure difference and noise. A new concept is put forward definition of base pressure: the stabilizing pressure in the standard test cover under specified working conditions with no introduction of gas. We propose leakage rate to replace ultimate pressure (base pressure) as the performance evaluation index of Roots pumps, to make the measurement method of Roots pump performance closer, more in line with the actual running state. According to the experimental datas, we put forward the improvement of the foreline regulation in the zero throughput compression ratio measuring device, the modification of the maximum permissible differential pressure measurement method and new opinion for the method of measuring noise for Roots pumps.
出处
《真空》
CAS
2015年第2期7-11,共5页
Vacuum
关键词
罗茨泵
特性
测试方法
Roots pump
characteristic
measurement method