摘要
介绍了利用偏光显微镜(PLM)、扫描电镜(SEM)、透射电镜(TEM)、X射线衍射(XRD)、拉曼光谱(RS)、电子自旋共振(ESR)和压汞法(MIP)等测试手段,对采用化学气相沉积(CVD)法制备的热解炭微观形貌、取向角OA、消光角Ae、石墨化度、孔隙结构等表征参数的优缺点进行了分析,总结出热解炭的织构类型以及各表征方法之间的关系,在此基础上对热解炭的研究发展方向进行了展望。
This paper explored the characterization methods for the microstructure , orientation angle OA, extinction angle Ae , graphitization degree and pore structure of the pyrocarbon that prepared by the method of chemical vapor deposition （ CVD）.The merits and demerits of each measurement were also analyzed .Some testing methods like polarized light microscope （ PLM ） , scanning electron microscope （ SEM ） , transmission electron microscope （ TEM ） , X-ray diffraction （ XRD ） , Raman spectrum （ RS ） , electron spin resonance （ESR） and mercury intrusion porosimetry（MIP） were introduced.It made a conclusion about the relationship between texture type and each characterization methods .Finally, based on the above research , the research direction of pyrocarbon was forecasted .
出处
《杭州电子科技大学学报（自然科学版）》
2015年第2期50-55,共6页
Journal of Hangzhou Dianzi University：Natural Sciences
基金
国家自然科学基金资助项目(50975070)
浙江省自然科学基金资助项目(LY12E05002)
关键词
化学气相沉积
热解炭
织构
微观结构
chemical vapor deposition
pyrocarbon
texture
microstructure
