摘要
研制出紧凑型树状分支结构马赫-曾德尔干涉(MZI)型有机聚合物1×2热光开关以及1×32集成波导热光开关阵列。利用旋转涂覆法、紫外固化工艺、接触曝光、反应离子刻蚀(RIE)、真空镀膜、切割和抛光等传统微加工工艺,成功完成了器件制备。通过优化刻蚀工艺,有效减小了刻蚀后波导的表面与侧壁粗糙度。通过在波导和金属掩膜层之间添加聚合物隔离层,进一步减小了波导的传输损耗。实验结果显示,制备的1×2热光开关插损仅为2.84dB,串扰为-31.13dB,光开关的电功耗为4.1mW;制备的1×32波导热光开关阵列插损为11.8dB,串扰为-25.3dB,电功耗小于5 mW,器件开关时间为1.15ms。测试结果与数值模拟结果吻合很好,研制的光开关有望应用于光交换器(OXC)、光分插复用器(OADM)以及光控相控阵天线的波束扫描控制系统中。
The tree branch Mach-Zehnder interference （MZI） structure 1 × 32 thermo-optic switch array with compact size is proposed and fabricated successfully in this paper. In this work,the polymer swit- ches were fabricated using the traditional micro-fabrication techniques, including spinning coating, ultra- violet （UV） curing, contact lithography, reactive iron etching （RIE）, vacuum evaporating, standard cut- ting and polish process. By choosing etching parameters and introducing a thin isolating layer between waveguides and a mask of aluminum,the roughness of the waveguide surface and sidewall is greatly re- duced. The fabricated 1 X 2 thermo-optic switch shows insertion loss of 2.84 dB, crosstalk of --31.13 dlg at an applied heating power of 4.1 mW. The fabricated 1 X 32 switch array shows insertion loss of 11.8 dB,crosstalk of --25.3 dB with heating power no more than 5 mW. The response time of the switch is 1.15 ms. The measured results are in accordance with the numerical simulation. These switches could be used in optical cross connect （OXC） system, optical add/drop multiplexer （OADM）, and in optically controlled phased arrayed antenna systems for beam steering.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2015年第10期1873-1877,共5页
Journal of Optoelectronics·Laser
基金
国家自然基金重点(61535012)资助项目
