摘要
针对数字化精密机械测量仪器和装备需要解决位移传感器信号的高倍数、高精度细分问题,通过对光栅位移测量模型的研究提出采用测量基准转换的思维方式构建空间序列理论。通过对各运动状态条件下精密位移动态测量信号的多尺度分解实现特征辨识,从而构建用于动态位移信号细分的自适应预测模型及相关细分误差实时修正技术。实验研究表明此方法可以实现圆光栅栅距内400倍细分,角位移细分误差-0.19″~0.27″。
Aiming at the high precision and high subdivision number issue of displacement sensor signals in the digital high-precision measuring instruments and equipment,the space series theory is established adopting the idea of measuring standard transformation based on the study on optical grating displacement measurement model. The multiscale decomposition method is used to achieve the characteristic identification of the precision displacement dynamic measurement signals under various motion states,and in this way the self-adaptive prediction model for dynamic displacement signal subdivision and corresponding subdivision error real time correction technology are established. Experiment study results prove that the maximum subdivision number can reach to 400 for round grating,and the angular subdivision error is within- 0. 19″ ~ 0. 27″.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2015年第10期2224-2230,共7页
Chinese Journal of Scientific Instrument
基金
国家自然基金(51175534
51305478)
重庆市基础与前沿研究计划(cstc2013jcyja70007)
重庆市教委科学技术研究(KJ1500905)项目资助
关键词
位移测量
信号细分
空间序列理论
特征辨识
多尺度分解
displacement measurement
signal subdivision
space series theory
characteristic identification
multiscale decomposition
