摘要
利用离子束辅助沉积技术和低温离子渗硫技术制备了二硫化钨/钨掺杂类金刚石(WS2/W-DLC)复合薄膜。采用扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、透射电子显微镜(TEM)、纳米硬度仪(Nano-indenter)和多功能摩擦磨损试验机(UMT)考察了薄膜的微观结构与摩擦学性能。结果表明:制备的薄膜在大气环境下表现出优异的力学性能和超低摩擦的性能,该复合薄膜中,硬质强化相纳米碳化物WC1-x和软质润滑相过渡族金属硫化物WS2、Fe S均匀镶嵌于类金刚石基体内形成复合结构,复合结构是薄膜表现出优异性能的主要原因。
A tungsten dichalcogenide / tungsten doped non-hydrogenated diamond-like carbon （WSJW-DLC） film was prepared by ion beam assisted deposition （IBAD） combined with low temperature ion sulfurization. The microstructure and tribological performance were performed by the scanning electron microscope （SEM）, Raman spectroscope, transmission electron microscope （TEM）, nano-tester and UMT friction tester. The results show that the film exhibits an excellent mechanical property, especially super lubricity. The film is composed of strengthening phase nanocrystallites β-WCl_x and lubricative WS2, FeS, which uniformly dispersed in the amorphous DLC matrix. Composite construction is the crucial factor of the excellent performance.
出处
《材料热处理学报》
EI
CAS
CSCD
北大核心
2016年第2期159-163,共5页
Transactions of Materials and Heat Treatment
基金
国家自然科学基金(51275494
51005218)
航空科学基金(2014ZB43001)
