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铬、碳掺杂TiAlSiN硬质涂层结构和性能研究 被引量:3

Structure and Properties of Cr and C Doped Hard TiAlSiN Coatings
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摘要 利用多弧离子镀设备,通过引入Cr和C元素对Ti Al Si N硬质涂层进行改性,制备出CrTiAlSiN和CrTiAlSiCN改性涂层。利用划痕仪、显维硬度计和球盘摩擦磨损机对3种涂层的结合强度和摩擦学性能进行对比研究。结果表明,改性后的CrTiAlSiN和CrTiAlSiCN涂层为Cr N和Ti(Al)N的复合结构涂层,C和Si元素以非晶化学态的形式存在。相比较于TiAlSiN涂层,CrTiAlSiN和CrTiAlSiCN涂层在保持较高结合强度的同时,硬度和摩擦系数均增加。 The modified CrTiAlSiN and CrTiAlSiCN coatings were synthesized by introduction of Cr and C atom using multi-arc ion plating(MAIP) equipment. The adhesive strength and tribological properties of TiAlSiN, CrTiAlSiN and CrTiAlSiCN coatings were compared by using scratch, micro hardness and ball-on-disc tester. The results show that CrTiAlSiN and CrTiAlSiCN coatings are the composite structure of Cr N and Ti(Al)N, and C and Si exist in the form of amorphous state. Compared with TiAlSiN coatings, CrTiAlSiN and CrTiAlSiCN coatings maintain a good adhesive strength, and their hardness and friction coefficient increase with the addition of Cr.
出处 《铸造技术》 CAS 北大核心 2016年第3期448-451,共4页 Foundry Technology
关键词 TiAlSiN 摩擦学性能 多弧离子镀 TiAlSiN tribological properties multi-arc ion plating
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