摘要
多晶硅作为太阳能光伏发电的主要材料,在太阳能光伏产业市场迅速发展的大背景下,对硅料清洁度的需求也逐步增加。化学清洗是目前硅料清洗的主要方法。本文综述了近年来硅料化学清洗的基本方法(RCA)及根据硅料的不同由RCA法发展出的其他化学清洗方法。
Silicon as the main material of solar photovoltaic power generation in the solar photovoltaic industry, the demand for silicon material cleanliness also gradualy increases under the background of the rapid development of the market. Chemical cleaning is the main method of silicon material cleaning. In this paper, the research progress of the standard cleaning method ( RCA ) and depending on the silicon material by RCA method to develop other chemical cleaning method was reviewed.
出处
《中国洗涤用品工业》
2016年第3期50-53,共4页
China Cleaning Industry
关键词
化学清洗
太阳能硅料
RCA标准清洗法
其他清洗方法
chemical cleaning
solar energy silicon material
the standard cleaning method of RCA
other cleaning method
