摘要
为提高测量效率以及测量准确度,在双微环级联结构的基础上加入了U形反馈波导,基于Si基脊形波导设计了一种可同时测量两个样品折射率的光波导传感器。本文传感器可以采用低成本的宽带光源作为信号源,利用输出光谱中谐振波长的漂移量和消光比变化实现对敏感窗口内波导覆盖层折射率的测量。与之前提出的带有U形波导的单微环传感器相比,本文传感器的结构解决了外界环境干扰和确定两段敏感波导折射率大小关系的问题,实现了对两个样品折射率信息的准确测量,其灵敏度约为1.25×10^2 dB/RIU。
In order to improve the measuring efficiency and accuracy, a sensitive cascaded double-microring sensor with U-bend waveguide based on SOI ridge waveguide is proposed for simultaneous measurement of two refractive indices. This sensor is designed with low-cost broadband signal source and the refractive indices are measured through the distance variation of resonant wavelength shift and the extinction ratio change at resonant wavelength. Compared with the single rrficroring sensor with U-bend waveguide pro- posed before, the new structure reduces the disturbance of external environment and enhances the meas- uring accuracies of two effective indices, which is determined by sample parameters change, such as gas/ liquid concentration,temperature and bio-chemical signal. The output spectra corresponding to different sensing methods are compared,and the sensitivity of the proposed structure is 1.25 × 10^2 dB/RIU. This structure lays a foundation for the future sensor design.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2016年第5期461-467,共7页
Journal of Optoelectronics·Laser
基金
国家自然科学基金(61471210
61501271)
王宽诚幸福基金资助项目
关键词
光波导传感器
微环谐振器
U形波导
折射率敏感度
optical waveguide sensor
microring resonator
U-bend waveguide
refractive index sensitivity
