摘要
The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8-12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4 C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 rim, we design aperiodic multilayers for broad wavebands of 9.0-10.0, 8.5-10.5, and 8.0-11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.
The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8-12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4 C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 rim, we design aperiodic multilayers for broad wavebands of 9.0-10.0, 8.5-10.5, and 8.0-11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.
基金
supported by the National Natural Science Foundation of China(Nos.11443007 and 11505129)
the NSAF(No.U1430131)
the National Key Scientific Instrument and Equipment Development Project(Nos.2012YQ13012505 and 2012YQ24026402)
the Shanghai Pujiang Program(No.15PJ1408000)
