摘要
利用溶胶-凝胶法在Pt/Ti/Si O2/Si基体上制备了BiFeO_3薄膜,构架了Pt/BiFeO_3/Pt电容器。对不同退火温度和保温时间制备薄膜的微观形貌和铁电性能做了研究。X射线衍射仪(XRD)结果显示,不同的退火温度和保温时间并没有改变BiFeO_3(BFO)的钙钛矿结构,但温度的改变会产生不同的晶相。通过扫描电子显微镜(FE-SEM)可以观察到,随着烧结保温时间的延长,薄膜晶粒有减小的趋势。P-E曲线结果表明,BFO薄膜在外加电场较高时易击穿,难以得到清晰饱和的电滞回线。
BiFeO3 film was prepared on Pt/Ti/SiO2/Si substrate by sol-gel method,framing the Pt/BiFeO3/Pt capacitor.The microstructure and ferroelectric properties of the films prepared by different annealing temperatures and holding times were studied.X ray diffraction（XRD） results showed that different annealing temperatures and holding times did not change the BiFeO3（BFO） bulk perovskite structure,but the change of temperature will produce different crystal phases.By scanning electron microscopy（FE-SEM）,it could be observed that the grain size had a decrease trend with the increase of the sintering holding time.P-E curves showed that BFO film was easy to breakdown when the applied electric field was high,and it was difficult to get a clear saturated hysteresis loop.
出处
《无机盐工业》
CAS
北大核心
2016年第8期43-45,59,共4页
Inorganic Chemicals Industry
关键词
铁酸铋薄膜
退火温度
保温时间
微观形貌
铁电性能
bismuth ferrite thin film
annealing temperature
holding time
microstructure
ferroelectric properties
