摘要
压电陶瓷迟滞特性对精密控制系统的精度具有重要影响,目前PZT迟滞特性的测量方法精度较低或者测量系统复杂,难以实现高精度测量。总结分析了目前测量压电陶瓷特性的方法,并使用基于激光回馈干涉原理的微片激光回馈干涉测量系统,利用物体表面的散射光对压电陶瓷的迟滞特性进行测量和分析。该方法不需靶镜,对被测对象要求较低,测量便捷,测量精度达到纳米量级,对精密控制系统中压电陶瓷的校准测量具有重要意义。
The hysteresis of piezoelectric transducers has significant impact on precise control systems. At present,the common methods of piezoelectric transducers hysteresis measurement have some disadvantages such as low accuracy and complex system,so they are difficult to realize high accuracy measurement. The current measurement methods of PZT were analyzed. The hysteresis of piezoelectric transducers was measured and analyzed based on microchip laser feedback interference system by using the scattered light on the surface of the object. The laser frequency-shifted feedback system does not need the target mirror,which means low demand for the measured target. It also has some advantages such as convenience and high resolution of nanometer level. The measurement method has significant guidance for piezoelectric transducers calibration in precise control systems.
出处
《激光与红外》
CAS
CSCD
北大核心
2016年第9期1060-1063,共4页
Laser & Infrared
基金
国家自然科学基金项目(No.61475082)资助
关键词
压电陶瓷
迟滞特性
激光回馈
piezoelectric transducers
hysteresis
laser feedback
