摘要
为充分利用半导体制造过程产生的大量数据,发掘数据中蕴含的价值,对半导体制造过程进行分析、预测和调控,建立了半导体制造大数据分析平台。归纳得出了半导体制造过程中大数据的特性,提出了半导体制造大数据分析体系架构,分析了其关键技术和实现方法。根据半导体制造过程中大数据的使用特点,将数据导入、去重、筛选、标准化等共性操作归入平台通用预处理层;预处理后的数据进入数据仓库层,在数据仓库中按主题进行组织;最上方的专用处理算法层根据上层应用的特定数据要求,从数据仓库中抽取数据,使用专用算法进行处理,为其提供标准化、可靠、可复用的数据资源。最后基于半导体制造企业的实际情况搭建了原型系统,对半导体制造过程产生的大量实际数据进行导入、存储、组织和预处理,并进行了性能测试和常用统计分析算法测试。
To analyze, predict and control semiconductor manufacturing process with the help of large amounts of data and its inherent value, a big data processing platform was designed and implemented. The characteristics of big data in semiconductor manufacturing were summarized, and a 3-layer framework was built, whose key techniques in the ~ramework were discussed. According to the utilization features of big data in semiconductor manufacturing, the common operations of original data records such as import, deduplicate, filter and standardize were classified into the general pre-processing layer of platform. The pro-processing data records were grouped by topic in the middle layer named data warehouse layer. According to specific requirement of upper application, the top layer named special data processing algorithm layer provided reliable and reusable data resource by extracting grouped data. A prototype system was built through the actual situation of semiconductor manufacturing corporation, and the real semiconductor manufacturing data was imported, stored, organized, pretreated and analyzed. Results showed that the proposed platform was a high-performance data analysis system.
作者
杨俊刚
张洁
秦威
张启华
康盛
YANG Jungang ZHANG Jie QIN Wei ZHANGQihua KANG Sheng(School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China Semiconductor Manufacturing International Corporation, Shanghai 201203, China)
出处
《计算机集成制造系统》
EI
CSCD
北大核心
2016年第12期2900-2910,共11页
Computer Integrated Manufacturing Systems
基金
国家自然科学基金资助项目(51435009
51275307)~~
关键词
大数据
制造过程数据
半导体制造
分布式处理
HADOOP
big data
manufacturing process data
semiconductor manufacturing
distributed processing
Hadoop
