摘要
为实现光谱共焦位移传感器的小型化、低功耗和高精度,在设计过程中选择体积小、耗电量小的白光LED作为传感器的光源,并使用光纤耦合器代替复杂的分光棱镜式光学系统结构。色散镜头采用消色差透镜与非球面透镜组合的方式,在使用较少透镜数量的情况下达到较好的像差校正能力。同时结合光强归一化等数据处理方法,消除白光LED光源光谱光强分布不均匀等因素对测量精度造成的影响,得到准确、稳定的峰值波长与位置间的对应关系。通过双频激光干涉仪对系统进行标定和测量,实验结果表明使用435~655 nm波段,系统测量范围可以达1.7 mm,平均测量精度1.8μm,满足一定的测量需求。
In order to realize miniaturization, low power consumption and high precision of spectrum displacement sensor, small-size, low power consumption white LED as the light source of the sensor is introduced as per design and optical fiber coupler is employed instead of complicated beam splitter prism optical system structure. The dispersive lens is a combination of spectrum lens and aspherical lens so that a better aberration correction capability is achieved with less quantity of lenses. In addition, by taking advantage of integrating the light intensity normalization data processing method, the impact on measurement accuracy from uneven distribution of white LED light source spectral intensity is eliminated, obtaining an accurate and stable correspondence between peak wavelength and location. With the aid of dual frequency laser interferometer for system calibration and measurement, the results show that the system measuring range can be up to 1.7 mm with average measurement accuracy of 1.8 μm at waveband 435-655 nm, meeting the designated measurement requirements.
出处
《中国测试》
CAS
北大核心
2017年第1期69-73,共5页
China Measurement & Test
关键词
位移传感器
光谱共焦
色散镜头
光纤耦合器
displacement sensor
spectrum confocal
dispersive lens
optical fiber coupler
