摘要
利用朗缪尔双探针等离子体诊断方法,研究了细长石英管内的低气压直流放电行为,探讨了细长管空间内的放电条件对等离子体参数的影响规律。结果表明:通过提高放电功率和增加阴极数目可以有效的提高等离子体密度,且当放电气压为100 Pa时,电子密度最大,本装置所测最大密度为1.03×10^(17)m^(-3);电子温度则随着放电功率和放电气压的增大而不断减小;放电距离越远,对击穿电压要求越高,分段式放电可以在较低的放电电压下,对较远的电极距离实现直流放电。
The argon plasma was generated by low voltage DC discharge in a slender quartz tube. The influence of the glow discharge conditions, including the discharge distance, discharge power, Ar-pressure and number of cath- odes, on the plasma properties was diagnosed with Langmuir double-probe. The results show that the DC discharge conditions significantly affected the properties of Ar-plasma. To be specific, the plasma density was effectively en- hanced by increasing the discharge power and number of cathodes; generated at 100 Pa, the highest electron density was measured to be 1.03 ×10^17 m^-3. The electron temperature decreased with the increases of the discharge power and At-pressure. Since longer discharge distance requires higher breakdown voltage, the multi-sectional discharge technique works well to generate plasma at a lower discharge voltage in a fairly long quartz tube.
作者
王权
王波
刘云辉
张天一
Wang Quan;Wang Bo;Liu Yunhui;Zhang Tianyi(College of Materials Science and Engineering,Beijing University of Technology,Be~iing 100124, China;（ 2. Department of Mechanical Engineering, Zaozhtmng Vocational College of Science ＆ Technology, Tengzhou 277599, China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2018年第4期259-263,共5页
Chinese Journal of Vacuum Science and Technology
基金
ITER专项项目课题(批准号:2013GB109003)
国家自然科学基金项目(批准号:51571003)
关键词
等离子体
直流放电
朗缪尔探针
电子密度
击穿电压
Plasma, DC discharge, I_angmuir probe diagnosis, Electron density, Breakdown voltage
