摘要
在相位测量轮廓术中,传统的相位-高度映射通过对若干已知高度平面的单次数据采集来完成标定。在标定过程中,不同时刻所采集的数据肯定有所不同,从而在标定时计算出的待标定系数也有所不同,这就影响了相位-高度映射精度。为了提高相位-高度映射精度,提出了对参与标定的平面进行多次测量,从而能得到多组标定系数,采用平均标定系数来代替单次标定系数的标定方法,使标定系数更加真实稳定,受时间的影响减小。通过测量若干给定高度平面验证了该方法的有效性,通过测量"心"形物体的三维面形验证了该方法的实用性,表明该方法能有效提高相位测量轮廓术测量精度。
A calibration method for improving the accuracy of phase-to-height mapping is proposed in this paper.In phase measuring profilometry,the traditional phase-to-height mapping is accomplished by data acquisition without repetition.During the calibration process,the data acquisition at different time will definitely be different,so the calibration coefficient at different calibrated time will also be different,which affects the phase-to-height mapping accuracy.In order to improve the phase-to-height mapping accuracy,the phase-to-height mapping is accomplished by data acquisition with multiple repetition,so that multiple calibration coefficients can be obtained.While the average calibration coefficients of the multiple calibrations are instead of the corresponding traditional calibration coefficients,the calibration coefficients will be actual and natural,and the influence with time-varying will be reduced efficiently.The experimental results by measuring several given planes show the validity of the proposed method.The experimental results by measuring a＂heart＂like object show the practicability of the proposed method.It is shown that the proposed method can effectively improve the accuracy of phase measuring profilometry.
作者
马秋娜
曹益平
陈澄
万莹莹
付光凯
王亚品
MA Qiu-na, CAO YI-ping ,CHEN Cheng ,WAN Ying-ying ,FU Guang-kai ,WANG Ya-pin(Department of Optical Electronics, Sichuan University, Chengdu, Sichuan 610065. China)
出处
《光学与光电技术》
2018年第3期1-7,共7页
Optics & Optoelectronic Technology
基金
国家高技术研究发展计划(863计划)(2007AA01Z333)
国家科技重大专项(2009ZX02204-008)资助项目
关键词
三维测量
相位测量轮廓术
系统标定
相位高度映射
三维重构
3D measurement
phase measuring profilometry
system calibration
phase to height mapping
3D reconstructlon
