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基于不等占空比二元光栅的相位测量轮廓术 被引量:9

Phase Measurement Profilometry Based on Binary Gratings with Unequal Duty Cycle
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摘要 提出了一种基于不等占空比二元光栅的相位测量轮廓术(PMP)。所用的光栅只有0和255两个灰度,消除了投影仪的伽玛非线性对正弦光栅灰度的影响,同时可将投影系统的刷新频率提高一个数量级。所提方法的测量精度高于罗奇光栅离焦投影傅里叶变换轮廓术的,重复精度高于传统正弦光栅PMP。 The phase measurement profilometry(PMP)based on binary gratings with an unequal duty cycle is proposed.The adopted binary gratings have only two grayscales of 0 and 255,and the effect of the gamma nonlinearity on the grayscale of the sinusoidal grating is eliminated.At the same time,the refresh frequency of the projection system can be increased by an order of magnitude.The measurement accuracy of this proposed method is higher than that of the Roach grating defocus projection Fourier transform profilometry and the repeat accuracy is higher than that of the traditional PMP based on sinusoidal gratings.
作者 陈雨婷 曹益平 陈澄 万莹莹 付光凯 王亚品 王璐 Chen Yuting;Cao Yiping;Chen Cheng;Wan Yingying;Fu Guangkai;Wang Yapin;Wang Lu(College of Electronics and Information Engineering,Sichuan University,Chengdu,Sichuan 610065,China)
出处 《光学学报》 EI CAS CSCD 北大核心 2018年第8期203-208,共6页 Acta Optica Sinica
基金 国家高技术研究发展计划(2007AA01Z333) 国家科技重大专项(2009ZX02204-008)
关键词 机器视觉 三维测量 二元光栅 不等占空比 滤波 相位测量轮廓术 machine vision three dimensional measurement binary grating unequal duty cycle filter phase measurement profilometry
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