摘要
针对各种复杂光学与工业元件的表面面形等加工误差检测需求,提出了基于相位偏折术的透射波前检测方法。为获得由透射元件加工误差引入的波像差,建立相位偏折检测系统并对模型化系统进行光线追迹,由实际测量结果相对光线追迹结果的变化计算得到待测元件波像差。并用计算机辅助的结构误差校正方法,对系统结构误差进行校正。为验证检测方法的可行性和大动态范围,分别进行Zygo干涉仪比对实验与工业透射元件检测实验,并对工业透射元件检测中的全反射问题及影响进行分析。结果表明,所提出的检测方法不仅能达到与干涉检测方法相当的检测精度,还能实现大动态测量范围,为各种光学及工业透射元件提供了一种可行有效的波前检测方法。
Aiming at the fabrication error test requirement of the surface shape of various complex optical and industrial elements, a transmitted wavefront test method based on phase measuring deflectometry technique is proposed. In order to obtain the ray aberration introduced by the processing error of the transmitted element, a phase measuring deflectometric test system is built and the ray tracing of the modeled system is carried. From the actual testing result of the deflectometric test system and the ray tracing result of the modeled test system, the ray aberration of the element under test can be obtained. With the computer-aided reverse optimization method, the systematic geometrical error is calibrated. In order to verify the feasibility and the large dynamic range of the proposed test method, the comparison experiment with Zygo interferometry and test experiment for industrial transmitted element were conducted with the proposed test method. The total internal reflection（TIR） and its effect existing in industrial transmitted element test was analyzed. The results show that the proposed test method can reach a high accuracy comparable with interferometer as well as large dynamic range. The proposed test method provides a feasible, effective, flexible and low cost method for the wavefront test of various optical and industrial transmitted elements.
作者
徐平
王道档
解钟敏
许新科
孔明
Xu Ping;Wang Daodang;Xie Zhongmin;Xu Xinke;Kong Ming(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China;Guangxi Key Laboratory of Optoelectronic Information Processing,Guilin University of Electronic Technology,Guilin 541004,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2018年第9期99-105,共7页
Chinese Journal of Scientific Instrument
基金
浙江省自然科学基金(LY17E050014)
国家自然科学基金(51775528)
中国博士后科学基金资助项目(188766)
广西光电信息处理重点实验室(培育基地)(GD18205)
质检公益性行业科研专项(201410009)
浙江省“仪器科学与技术”重中之重学科开放基金(JL150508)项目资助
关键词
透射波前检测
相位偏折术
光线追迹
大动态范围
transmitted wavefront test
phase measuring deflectometry
ray tracing
large dynamic range
