4[1]Boser B E. Electronics for Micromachined Inertial Sensors. 9th Int. Conf. Solid- State Sensors and Actuators ,Chicago, 1997
5[3]Baxter L K. Capacitive Sensors Design and Applications. Wiley-IEEE Press ,1997
6[5]Boser B. Electronic Interfaces for MEMS. http://www bsac. eecs. berkeley. edu/～ boser/. 2005-03
7[6]Mancini R. Op Amps for Everyone. http://www.ti. com. 2005-03
8B Vakili Amini,S Pourkamali,F Ayazi.A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise,low power,0.25.m CMOS interface[ A] .in Proc. IEEE MEMS[ C]. Kyoto: Jan. 2003.572 - 575.
9J Chae , K Najafi. An in-plane high sensitivity micro-g accelerometer[ A]. in Proc. IEEE. MEMS[ C ]. Kyoto: Jan. 2003. 466-469.
10N Yazdi , K. Najafi. An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process[ J ]. J. Microelectromech. Syst., 2000, 9 ( 4 ) : 544 - 550.
